| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-785
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66795
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823431
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-0886 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-20 |
| filingDate |
2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e08d91ff19fce642276d4cd68e163970
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_826b4a7de7875602d334b86fca131fc2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_74bb981ea1d08731e68abe871800725c |
| publicationDate |
2014-05-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014120701-A1 |
| titleOfInvention |
Dual gate finfet devices |
| abstract |
A method comprises: forming a first array of fins and a second array of fins on a substrate; masking off the first array of fins from the second array of fins with a first mask; depositing a dielectric layer on the second array of fins and on the first mask on the first array of fins; masking off the dielectric layer deposited on the second array of fins with a second mask; removing the dielectric layer and the first mask from the first array of fins; removing the second mask from the second array of fins to expose the dielectric layer on the second array of fins; and depositing a chemox layer on the first array of fins. The chemox layer is thinner than the dielectric layer on the second array of fins. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9865459-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016314960-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015123212-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9048303-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9129905-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9837520-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9337279-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9647104-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015118832-A1 |
| priorityDate |
2012-11-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |