http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014070426-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_62d249fa11cbd3bb27aa896936cc09e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_308a6cd9efb801e68d2a0660dfa4f53c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ede7fb13d68f20f1e64ce8fb219e141a
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1461
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-131
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-15311
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16145
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-03002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13007
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-06181
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-13082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0401
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-32225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06517
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-1815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-552
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-16225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-00014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-0557
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-13091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-49827
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-768
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-486
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-48
filingDate 2013-06-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_553be506f92595d841467f0f290e08af
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d46338ab35ca045e83f6132302e6badc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b77de38589030ca76a5bdac988314d54
publicationDate 2014-03-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014070426-A1
titleOfInvention Integrated circuit devices including a via structure and methods of fabricating integrated circuit devices including a via structure
abstract Integrated circuit devices are provided. The integrated circuit devices may include a via structure including a conductive plug, a conductive barrier layer spaced apart from the conductive plug, and an insulating layer between the conductive plug and conductive barrier layer. Related methods of forming integrated circuit devices are also provided.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113035777-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015287907-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9041218-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10475758-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021335735-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020144158-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10629568-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10943939-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014145268-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11495559-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I581405-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9553020-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9455158-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10763163-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9543257-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9941249-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019066977-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11574842-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11345591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10155660-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107078055-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9634240-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10056353-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10304818-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11728258-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10508028-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10510729-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10229949-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I708365-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10269768-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8963336-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10068859-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9754925-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9196620-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017162545-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043445-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11031348-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017287967-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11257745-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9748106-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-114937650-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11600552-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014167289-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9449914-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10453801-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021296211-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3598482-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11515204-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9425150-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9064941-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9412719-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11282802-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11488860-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10756133-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015325531-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11437272-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9406712-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10157891-B2
priorityDate 2012-09-12-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014061839-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8598687-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8207595-B2
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159419
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415776239
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82895
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91500
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454092735
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161922877
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454232550
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449693299
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450964499
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16217677
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448362446
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID150906
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426223773
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31170
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID166703
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID161827978
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419522147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419557764
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453284447
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453357195
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158731258
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID82899

Total number of triples: 132.