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publicationDate 2014-02-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014057439-A1
titleOfInvention Method of Forming Interlayer Dielectrics
abstract A method of forming interlayer dielectric comprising the steps of forming a first undoped layer, forming in-situ and sequentially a doped layer and a second undoped layer on the first undoped layer, and planarizing the second undoped layer.
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