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publicationDate 2014-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2014027838-A1
titleOfInvention Semiconductor device and method for manufacturing the same
abstract According to one embodiment, the stair array includes a deep portion, one stair, and a plurality of stairs. The one stair is provided next to the deepest portion in the first direction and has a level difference of one step with the deepest portion. Each of the stairs has a level difference of a plurality of steps with a stair next in the first direction.
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http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019319040-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022130830-A1
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Total number of triples: 45.