| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d0693ed4f2b7b1fab97515ac2f1f311c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2015-0261 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N15-0255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-2208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B44C1-227 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22 |
| filingDate |
2013-10-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6ed61d81cf1e369dbe6dc445d58e1ed6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f83c4b744e810e5ae9ad3fe6acb15628
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a55250f7184e501f0d828e7f10ad637e |
| publicationDate |
2014-01-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014027406-A1 |
| titleOfInvention |
Method for manufacturing a nozzle plate containing multiple micro-orifices for cascade impactor |
| abstract |
A nozzle plate containing multiple micro-orifices for the cascade impactor and a method for manufacturing the same are disclosed. The nozzle plate is formed by a series of semiconductor processes, including lithography, etching and electroplating. The nozzle plate comprises a plate body and a plurality of micro-orifices formed on the plate body. The orifice has a diameter which gradually expands in the direction away from the bottom of the plate body to achieve a smooth inner surface, allowing particles to pass therethrough smoothly without being clogged in the nozzle plate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017201314-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11546822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017013542-A1 |
| priorityDate |
2010-03-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |