| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24174
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24661
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24628 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0086
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-0003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0081
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0841
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-38 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B81B7-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-38 |
| filingDate |
2013-09-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ea435dd12b170b9205ba7421e551f79c |
| publicationDate |
2014-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2014016171-A1 |
| titleOfInvention |
Dielectric microstructure for use in microelectromechanical system (mems) devices and method of forming same |
| abstract |
Disclosed herein is a dielectric microstructure with a substantially unit dielectric constant K for use in microelectromechanical systems. |
| priorityDate |
2007-12-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |