| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_00a421ab71bd49a451d0a49d23a082c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_986d0ab29fa7910a46cd21a12d682fe4 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-308
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-4836
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-327 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-327 |
| filingDate |
2013-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a1cf8bfb3c8dc560a5d3d3586a0afae0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ccdb2d7744e722354b5776ce064a67fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1b09f84e442f1ac5bd64ac4baa5609ae |
| publicationDate |
2013-12-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013341185-A1 |
| titleOfInvention |
Micro-Stimulation and Data Acquisition From Biological Cells |
| abstract |
The present invention relates to a method for fabricating a semiconductor device for stimulation and/or data recording of biological material to a such semiconductor device. The method comprises providing a semiconductor substrate comprising a first insulating layer; providing a patterned conductive layer on top of the first insulating layer; depositing and patterning a second insulating layer atop the patterned conductive layer; growing carbon nano-sheets atop the second insulating layer; and defining carbon nano-sheet electrode areas on the second insulating layer by etching away the carbon nano-sheets outside of the carbon nano-sheet electrode areas. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017334717-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11229789-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10307591-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10953225-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11536684-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11291828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11730958-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11458311-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11077301-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10501315-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10016600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10946185-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10918853-B2 |
| priorityDate |
2012-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |