| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_49c4c5f2bb44717888569860293f09f1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c5014506094a9a34fed72a76c727bd39
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c315271e4601afe75b5511ae33ba36f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1805095ad07a809a15d54195f5b1ec61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4ceecbcd23c51aae7c6baf46f03369c7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_38ed56a4b4e8e2315b2b3308bffedb3f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2441ef530118c25e969ca994995bf2e9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a239edc29471a9affb81d50b32c9ba12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bf07cb4c7510dcfc7202180134f8fabc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1464
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14689
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0334
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-14603 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate |
2012-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_913b8804a5f8ecf18b7226056a33cdfa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0941756b0adb162a211566304b83d1d2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d3a33ab673222dd441ea201964df372
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2f3d72cfcb9b1a25016b78e348080d9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c3a9f4a1d875545833e0bc5cd115d50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4c9987a342d2d6466571d220dd80c335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34bdb15edb5961daedf917748a0533c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b79dac572d2f44fbabb4cb6d7222f42c |
| publicationDate |
2013-12-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013327921-A1 |
| titleOfInvention |
Image device and methods of forming the same |
| abstract |
A method of forming of an image sensor device includes a substrate having a pixel region and a periphery region. A plurality of first trenches is etched in the periphery region. Each of the first trenches has a depth D 1 . A mask layer is formed over the substrate. The mask layer has a plurality of openings in the pixel region. A spacer is formed in an interior surface of each opening. A plurality of second trenches is etched through each opening having the spacer in the pixel region. Each of the second trenches has a depth D 2 . The depth D 1 is larger than the depth D 2 . |
| priorityDate |
2012-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |