| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89afae566b725ae78e20cf972d9bcdc7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-635
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C69-616
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C303-32
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C309-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-004 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2013-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_505218b0894cc57fcc679b7e6d3bfd96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa096bba069e48b6f161e1af3f70bce9 |
| publicationDate |
2013-12-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013323645-A1 |
| titleOfInvention |
Resist composition, method of forming resist pattern, and compound |
| abstract |
A resist composition including a base component (A) which exhibits changed solubility in a developing solution under action of acid and an acid generator component (B) which generates acid upon exposure, the acid generator component (B) including a sulfonium compound (B1) having a sulfonio group and an anion group represented by general formula (b1-r-1) shown below in one molecule thereof (wherein Y 1 represents a divalent linking group or a single bond; L 1 represents an ester bond or a single bond; V 1 represents a divalent hydrocarbon group having a fluorine atom; and n represents 0 or 1, provided that, when L 1 represents a single bond, n=1). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111208710-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111458980-A |
| priorityDate |
2012-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |