| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4b568b5effe72a96bd0aa544888b0548
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_22fd64a8ae1c338a03570e64e0a57982
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c7780cb4727adc3c4123263a9d1e3253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e5db580deca7130dbe51805c6c608b35
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_58208e061ee6edb819392cd5dcaa632f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66462
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67057
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0272
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02057 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2013-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c186f438f472d56d07b2e98264b57993
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d99e5da576ff0bc6ac7e4761ba0fd9aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f2b11966292959f0ee5c589ba9e2193f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86d327aef28d99bfb93f0b139e8a4fa0 |
| publicationDate |
2013-11-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013306102-A1 |
| titleOfInvention |
Method of manufacturing semiconductor device and method of cleaning semiconductor substrate |
| abstract |
A method of manufacturing a semiconductor device includes: holding a semiconductor substrate with a surface inclined with respect to the vertical direction and the horizontal direction; and immersing the semiconductor substrate in a cleaning solution including an acid. |
| priorityDate |
2011-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |