| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bce787970b69aeb08d159e7c101c9ed7 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32862
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B08B7-0021 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B08B7-00 |
| filingDate |
2013-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c60fff14ef82dcc2e61b15e594b76db8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5ac58e064a66929d86ffde79680662ad
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dcd79d955774624a15dd5459e5de68aa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c62d46b953521298e0adbd20baaa1858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e2a428ee545a88915035a720027aae53 |
| publicationDate |
2013-10-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013284204-A1 |
| titleOfInvention |
Method for uv based silylation chamber clean |
| abstract |
Embodiments of the invention generally provide methods for cleaning a UV processing chamber. In one embodiment, the method includes flowing an oxygen-containing gas through a plurality of passages formed in a UV transparent gas distribution showerhead and into a processing region located between the UV transparent gas distribution showerhead and a substrate support disposed within the thermal processing chamber, exposing the oxygen-containing gas to UV radiation under a pressure scheme comprising a low pressure stage and a high pressure stage to generate reactive oxygen radicals, and removing unwanted residues or deposition build-up from exposed surfaces of chamber components presented in the thermal processing chamber using the reactive oxygen radicals. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109643638-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9534839-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020164686-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015031204-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110310901-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9793108-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8911553-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9748104-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-7306195-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8753449-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013145640-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014363903-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10361100-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-113412166-A |
| priorityDate |
2012-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |