| abstract |
A method of manufacturing a ferroelectric thin film on a lower electrode by electrostatically spraying a ferroelectric thin film-forming sol-gel solution from a spout of a capillary toward the lower electrode of a substrate having the lower electrode so as to coat the sol-gel solution on the lower electrode and form a coated film, drying, calcining, and then firing the coated film so as to crystallize the coated film, in which a distance between the spout of the capillary and the lower electrode and an applied voltage during electrostatic spray are set so that a refractive index during drying and calcination of the coated film becomes 2 or more, and a film thickness sets in a range of 150 nm or less when the sol-gel solution is coated in a single spray process, calcined, and then fired so as to be crystallized. |