http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013252373-A1

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filingDate 2011-08-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f48aaadc5d867b0821a8d17d6d94aea0
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publicationDate 2013-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013252373-A1
titleOfInvention Method for Depositing a Coating on a Substrate by Chemical Vapour Deposition
abstract The present invention is related to a method for depositing a coating on a substrate ( 2 ) by a flame-assisted chemical vapour deposition technique, wherein the substrate is exposed to a flame produced by a burner ( 1 ), while a flow of precursor elements is added to said flame, and wherein the substrate is subjected to a relative movement with respect to said burner wherein the flame is dragged out along a reaction zone ( 3 ) situated behind the burner, and wherein the relative speed of the substrate with respect to the flame is higher than 30 m/min.
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priorityDate 2010-08-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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