| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6e52c335190cfd0277a27e7391f4918b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ef984517ad4fa88458ab2a9b88ab9961
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d5af91813604596815e845e177f365a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a19ad38cfdacadbb4072a9a3ad2f494 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0232
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0289
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-2632 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-27
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-1702
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-2418
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-041 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-04 |
| filingDate |
2011-05-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe82a070e375a5030788c5df4a81e1f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e66862928c1fc0f74656ec9536d93c18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b28cafe61bfa9d67ccd85ff43f6a7ca1 |
| publicationDate |
2013-09-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013247658-A1 |
| titleOfInvention |
Optoacoustic inspection device for inspection of semiconductor wafers |
| abstract |
An inspection device is provided which comprises a receiving member defining an open cell for receiving a target therein. An optical excitation input is in optical communication with the cell for exciting the target. At least one acoustic pickup is in acoustic communication with the cell for picking up acoustic energy resultant from excitation of the target. A recorder is provided for recording the acoustic energy picked up from the at least one acoustic pickup for facilitating structural analysis of the target. |
| priorityDate |
2010-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |