| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d3f318632d00af7fe78eb78e5b79a4f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f5683128b8d26f539f06f00f8bc6a0d0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-24 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-00 |
| filingDate |
2013-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_28d3c69e0c5bb801e2a4a751b6918adc |
| publicationDate |
2013-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013224636-A1 |
| titleOfInvention |
Mask for near-field lithography and fabrication the same |
| abstract |
Methods for fabricating nanopatterned cylindrical photomasks are disclosed. A master pattern having nanometer scale features may be formed on a master substrate. A layer of an elastomer material may be formed on a surface of a transparent cylinder. The master pattern may be transferred from the master to the layer of elastomer material on the surface of the transparent cylinder. Alternatively, a nanopatterned cylindrical photomask may be fabricated by forming a pattern having nanometer scale features on an elastomer substrate and laminating the patterned elastomer substrate to a surface of a cylinder. In another method, a layer of elastomer material may be formed on a surface of a transparent cylinder and a pattern having nanometer scale features may be formed on the elastomer material by a direct patterning process. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012274004-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9594193-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9244356-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/RU-2695290-C2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9481112-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019112521-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9720330-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018191383-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9126432-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9972781-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9452574-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013153534-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016203403-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013069083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9981410-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10395461-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9782917-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018297267-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10451772-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017116808-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016109204-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107107607-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9465296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107850833-A |
| priorityDate |
2010-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |