| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bedead7c3f85cd80952e7e0dd57e564f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3d162bd56c615b34a08f500b3c59cbf6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-31749
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0815
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-0817 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J49-167
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32018
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-3171
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J27-205 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J27-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-14 |
| filingDate |
2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0b6fdf01db1383d3696e40872004979e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1befb52f01ffcd5e506d4ce039024405 |
| publicationDate |
2013-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013221232-A1 |
| titleOfInvention |
Microplasma ion source for focused ion beam applications |
| abstract |
The present invention provides a method of obtaining a bright source of ions with narrow energy spread for focused ion beam applications using micro plasmas. As a preferred embodiment, a high pressure microplasma source operating in a normal glow discharge regime is used to produce a cold bright focused beam of Xe + and/or Xe 2 + ions having ion temperature of the order of 0.5-1 eV and a current density on the order of 0.1-1 A/cm 2 or higher. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10651005-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9941094-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018218875-A1 |
| priorityDate |
2012-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |