| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_80f270ad9ea3b1f1a8f0115de4ccf3b6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02063
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2885
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-288
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28518
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-022425
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02697
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02 |
| filingDate |
2013-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8aeb2c09fafbc295ff59112ce7c5cc8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78f82b0afacc81f8d1550a193e8e6a1b |
| publicationDate |
2013-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013203252-A1 |
| titleOfInvention |
Activation process to improve metal adhesion |
| abstract |
Native oxide removing and activating solutions containing fluoride ions and organic acids are used in the formation of metal layers on semiconductor wafers. The method may also be used in the formation of silicides and for preparing the metal silicides for additional metal plating and build-up. The solutions and methods may be used in the manufacture of photovoltaic devices and other electronic devices and components. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9960051-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109920577-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015081077-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682739-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018019137-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017133521-A1 |
| priorityDate |
2012-02-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |