| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c6ead544352b749233c4d4c7f727058f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d3d3738627e6f693ae2ac820ec8bde9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_563417bc490f7b5fe394de540cc8dc13
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2fadcae3196ca725b795713aa49cd9f1 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2009-005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2909-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C2059-023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29K2883-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29L2031-756 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C59-026
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D1-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-44
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05C11-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-00 |
| filingDate |
2012-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5f966c00beda9fc3c7bcad5ee98028df
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5689af5f86e9463514e7f988b29818bc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e8ca282da42ff6d0adf5a00610defb7f |
| publicationDate |
2013-08-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013196122-A1 |
| titleOfInvention |
Method of surface tension control to reduce trapped gas bubbles |
| abstract |
The embodiments disclose a method of surface tension control to reduce trapped gas bubbles in an imprint including modifying chemistry aspects of interfacial surfaces of an imprint template and a substrate to modify surface tensions, differentiating the interfacial surface tensions to control interfacial flow rates of a pre-cured liquid resist and controlling pre-cured liquid resist interfacial flow rates to reduce trapping gas and prevent trapped gas bubble defects in cured imprinted resist. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013078820-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105137712-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110366703-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9500592-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111708260-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8946093-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014362373-A1 |
| priorityDate |
2012-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |