Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_29998470fe70f37e994f60459438c6f8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a8d191df2a239d8ebabcdd5981838060 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E10-50 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-03926 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76841 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-0392 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L31-048 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-545 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate |
2011-07-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a0e9f357f55b84b57f95e0bcdecadbb3 |
publicationDate |
2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2013178060-A1 |
titleOfInvention |
Method for Manufacturing a Barrier Layer on a Substrate and a Multi-Layer Stack |
abstract |
A method for manufacturing a barrier layer ( 14 ) on a flexible substrate ( 6 a, 6 b ), comprising depositing an inorganic layer on the substrate in a treatment space ( 5 ), the treatment space ( 5 ) being formed between at least two electrodes ( 2, 3 ) for generating an atmospheric pressure glow discharge plasma. The barrier layer ( 14 ) is characterized in that it is formed by three subsequent depositions of inorganic layers on the substrate ( 6 a, 6 b ), each layer being at most 150 nm in thickness. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11641001-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016097881-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105654854-A |
priorityDate |
2010-07-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |