| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2b995203afca0327fddc7680973a8573
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aba37a8fd8c2f9b8168095379f7e30d7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-265 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4554
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-40 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-40 |
| filingDate |
2012-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c9108d59f3c57bcbfb2eb5468432d0ab |
| publicationDate |
2013-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013177760-A1 |
| titleOfInvention |
Mixed metal oxide barrier films and atomic layer deposition method for making mixed metal oxide barrier films |
| abstract |
A method of forming a thin barrier layer film of a mixed metal oxide, such as a mixture of aluminum, titanium, and oxygen (AlTiO), comprises sequential exposure of a substrate having a surface temperature less than 100° C. to a halide precursor, an oxygen plasma, and a metalorganic precursor. Barrier films formed by the method exhibit improved water vapor transmission rate (WVTR) over single metal oxide films and nanolaminates of two metal oxides having a similar overall thickness. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9633850-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017088951-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014322527-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3213341-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10442907-B2 |
| priorityDate |
2011-07-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |