| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b197babb9482d0763eab0c871fc40baa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43d6972411aeef57c0b0df80124633b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9279b0a1592fbf583e270210beb2f44a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b7317808024e524eea40a6c5a5ad6a22 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2200-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2400-0415
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-00783
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-1827
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T436-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2201-058
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-0645
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L2300-1883
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J2219-0095 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N15-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0023
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01L3-502707
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L37-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01L3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L37-00 |
| filingDate |
2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fa6dfee0730fe7aa6c3eb7e5f768965c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef44c5a3e486f094a82cd6c8f98b0f4d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f158778626612cb64ef8ce3a3f3e92a9 |
| publicationDate |
2013-06-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013149215-A1 |
| titleOfInvention |
System-in-package platform for electronic-microfluidic devices |
| abstract |
The present invention relates to an integrated electronic-microfluidic device an integrated electronic-microfluidic device, comprising a semiconductor substrate ( 106 ) on a first ( 122 ) support, an electronic circuit ( 102, 104 ) on a first semiconductor-substrate side of the semiconductor substrate, and a signal interface structure to an external device. The signal interface structure is arranged on the first semiconductor-substrate side and configured to receive electrical signals from the electronic circuit. A microfluidic structure ( 126 ) is formed in the semiconductor substrate, and is configured to confine a fluid and to allow a flow of the fluid to and from the microfluidic structure only on a second semiconductor-substrate side that is opposite to the first semiconductor-substrate side and faces away form the first support. The electronic-microfluidic device forms a flexible platform for the formation of various System-in-Package applications. It achieves a clear separation between electrical and wet-chemical interfaces. The claimed method for fabricating the device of the invention also allows a simple formation of thermally isolated microfluidic structures. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9337063-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11413621-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11787180-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11371091-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8772929-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016044244-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020043907-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013119533-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10214772-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10632462-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10519493-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10964681-B2 |
| priorityDate |
2006-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |