| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_86394b06af8b4d512147944bc901da53
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_93b3349c90975a32774445644ec8eedf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_60540a8cc835f4decebbe584e379d08f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8fd1e4193f0f5eb58621db6ec20566a5 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2203-0145 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00317 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G09G3-34
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G02B26-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-12 |
| filingDate |
2011-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1ea8618527e2665ddd24f5b12a35d22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0f0f89519774fad162350922c70f70e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf83e75153a36af1eea9d24f1cb86f4e |
| publicationDate |
2013-05-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013135184-A1 |
| titleOfInvention |
Encapsulated arrays of electromechanical systems devices |
| abstract |
This disclosure provides systems, methods and apparatus for encapsulating electromechanical systems devices. In one aspect, large arrays of electromechanical systems devices can be encapsulated. In one aspect the encapsulation includes an encapsulation layer supported over the electromechanical systems devices by encapsulation layer supports. The encapsulation layer can also include a plurality of orifices. The orifices can be sealed such that the electromechanical systems devices below are not damaged. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017183221-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106132868-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11747934-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2021405806-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10280073-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017501892-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015122951-A3 |
| priorityDate |
2011-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |