| abstract |
Disclosed are a piezoelectric micro power generator which converts mechanical energy to electric energy to produce electric power and a fabrication method thereof. The piezoelectric micro power generator according to an exemplary embodiment of the present disclosure includes a piezoelectric structure having a silicon base, a lower electrode formed on the silicon base, a piezoelectric film formed on the lower electrode and configured to generate electric energy in response to a change of mechanical strain, an upper electrode formed on the piezoelectric film and a proof mass coupled to a portion of a bottom surface of the silicon base and configured to control response characteristics to vibration frequency, and a frame having an opened cavity of a predetermined size and coupled to a portion of the bottom surface of the silicon base such that the proof mass is located within the cavity so as to suspend the piezoelectric structure. |