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publicationDate 2013-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013126983-A1
titleOfInvention Semiconductor Architecture Having Field-effect Transistors Especially Suitable for Analog Applications
abstract An insulated-gate field-effect transistor ( 220 U) utilizes an empty-well region for achieving high performance. The concentration of the body dopant reaches a maximum at a subsurface location no more than 10 times deeper below the upper semiconductor surface than the depth of one of a pair of source/drain zones ( 262 and 264 ), decreases by at least a factor of 10 in moving from the subsurface location along a selected vertical line ( 136 U) through that source/drain zone to the upper semiconductor surface, and has a logarithm that decreases substantially monotonically and substantially inflectionlessly in moving from the subsurface location along the vertical line to that source/drain zone. Each source/drain zone has a main portion ( 262 M or 264 M) and a more lightly doped lateral extension ( 262 E or 264 E). Alternatively or additionally, a more heavily doped pocket portion ( 280 ) of the body material extends along one of the source/drain zones.
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