patent/US-2013109192-A1

http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013109192-A1

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filingDate	2011-10-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor	http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_747cf1c5d4298b066d8198edb4f544ff http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e90d97f4d9a546c6b73890b0d8d883c0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_baf1e5202ca7c1db2f3b6f0f19844b6b
publicationDate	2013-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber	US-2013109192-A1
titleOfInvention	Susceptor with ring to limit backside deposition
abstract	A susceptor including a generally circular body having a face with a radially inward section and a radially outward section proximate a circumference of the body, the radially outward section having at least one ring extending upward for contacting a bottom surface of a substrate, and wherein the radially inward section lacks a ring extending upward from the face.
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