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publicationDate 2013-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013109170-A1
titleOfInvention Deposition method and a deposition apparatus of fine particles, a forming method and a forming apparatus of carbon nanotubes, and a semiconductor device and a manufacturing method of the same
abstract A deposition method of fine particles, includes the steps of irradiating a fine particle beam formed by size-classified fine particles to an irradiated subject under a vacuum state, and depositing the fine particles on a bottom part of a groove structure formed at the irradiated subject.
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