| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_424db9d56b06a23aed410fcf5df652f3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3f2d5dd2606eeb6d99d0b6bb22ca9283
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_02c463387c0ffbdb9665f3d3b39aa0ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_615e317043179c5eb2feec77150b964b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08K5-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0046 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08K5-05
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09D167-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F1-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G63-682
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20 |
| filingDate |
2012-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8270730871bbc2e4242d49ffbc7c8c3d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb5fd3684d6588a276bddfafad390104
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a187028e8333d29dfc7bd48ad0eeeb31 |
| publicationDate |
2013-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013084517-A1 |
| titleOfInvention |
Resist protective film-forming composition and patterning process |
| abstract |
A protective film-forming composition comprising a polymer comprising fluorinated alcohol units of the structure: —C(CF 3 ) 2 OR 1 wherein R 1 is H or a monovalent hydrocarbon group and having a Mw of 1,000-500,000 is applied onto a resist film to form a protective film thereon. The protective film-forming composition has high water repellent and water slip performance. The protective film exhibits barrier properties to water and prevents any resist components from being leached out in water. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9758609-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017226252-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016004159-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9423692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102126894-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016179002-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10023674-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20140111510-A |
| priorityDate |
2011-10-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |