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filingDate 2011-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2013-04-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013084407-A1
titleOfInvention Plasma-enhanced deposition of copper-containing films for various applications using amidinate copper precursors
abstract The disclosure relates to a process for depositing a Copper, Gold or Silver containing film using a Copper, Gold or Silver guanidinate and/or Copper, Gold or Silver amidinate precursor, suitable for plasma deposition at temperature equal or lower than 120 degrees C., to a plasma deposition process carried out at a temperature equal or lower than 120 degrees C.
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