http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013080981-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b765a30fcea696a3f8c845a1d439caa7 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-36 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F17-50 |
| filingDate | 2011-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c8a7b07a4021a3cddc4cfacb95e6c54b |
| publicationDate | 2013-03-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2013080981-A1 |
| titleOfInvention | Method for improving optical proximity simulation from exposure result |
| abstract | A method for improving an optical proximity simulation is disclosed. First, multiple exposure data are determined. An original simulation result corresponding to the exposure result and generated from multiple original simulation parameters is provided. Then, an original deviation value from the original simulation result and the exposure result is verified to determine whether it is within a predetermined range. Next, the original simulation parameters are adjusted to obtain adjusted simulation parameters. The adjusted simulation parameters whose adjusted deviation value is within the predetermined range are collected to obtain an optical proximity correction model for outputting a pattern on a reticle. |
| priorityDate | 2011-09-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
| Predicate | Subject |
|---|---|
| isDiscussedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419533090 http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7099 |
Total number of triples: 13.