| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b99b8423cbe77cda8d88ccdf9e7d9f2c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1af8df51ce24ca931ae718fb747f6aa0 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-60
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B2290-70 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-0209
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02014
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02069
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B11-2441
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B9-02008 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01B9-02 |
| filingDate |
2012-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_00f8dab211955568c7a82362018cccf6 |
| publicationDate |
2013-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013063728-A1 |
| titleOfInvention |
Measuring apparatus |
| abstract |
A measuring apparatus includes an optical frequency comb source configured to emit an optical frequency comb in which a plurality of frequency components are arranged at equal frequency intervals, a beam splitter configured to split a beam emitted from the optical frequency comb source into a test beam to be irradiated onto a test surface and a reference beam to be irradiated onto a reference surface, an optical path difference changing element configured to change an optical path difference between the reference beam and the test beam, an image sensor configured to capture an interference pattern formed by interference between the test beam and the reference beam, and an analyzer configured to calculate a position of the test surface based upon a signal of the interference pattern captured while the optical path length difference is being changed by the optical path difference changing element. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018005987-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107063125-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10760900-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108917643-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112033551-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018194985-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017044702-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-111721231-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018059032-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110869695-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10728469-B2 |
| priorityDate |
2011-09-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |