| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b09cefa920e811da096c9b324a36e9b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_114bc05ecd66407cf48a5ff01330fca8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_97f025a2fe7877f7435c48ca793b9036
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7a911d04aed3ce17150d01a5c90a09db |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45591
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4585
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45565 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-46 |
| filingDate |
2011-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e32a16d9ea6d6bf302ccf7d129a98967
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_19435d5edce52a5f63810cdfb44b1807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0c560869bce0b0c391c53bbe1e664e0 |
| publicationDate |
2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013052371-A1 |
| titleOfInvention |
Movable liner assembly for a deposition zone in a cvd reactor |
| abstract |
A chemical vapor deposition (CVD) reactor comprises a deposition zone, a substrate carrier and a liner assembly. The deposition zone is constructed so as to have a positive pressure reactant gases fixed showerhead introducing reactant gas supporting thin film CVD deposition. The substrate carrier movably supports a substrate and the liner assembly within the deposition zone and is heated so as to be subjected to a CVD process. The liner assembly partly encloses selected portions of the deposition zone, particularly portions of the substrate carrier and thereby enclose a hot zone surrounding a substrate to be processed so as to retain heat in that zone but allows gas flow radially outwardly toward walls of a surrounding cold-wall reactor with exhaust ports surrounding the deposition zone that exhaust spent reactant gases. The liner assembly is a sink for solid reaction byproducts while gaseous reaction byproducts are pumped out at the exhaust ports. The liner assembly is linearly movable away from the fixed showerhead. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10508340-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110499499-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9145303-B2 |
| priorityDate |
2011-08-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |