http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013049113-A1

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classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-336
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-10
filingDate 2011-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bd7dae8b6ca534e1d1b6e9853913ed0c
publicationDate 2013-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013049113-A1
titleOfInvention U-shape resurf mosfet devices and associated methods of manufacturing
abstract The present technology discloses a U-shape RESURF MOSFET device. Wherein the MOSFET device comprises a drain having a drain contact region and a drift region, a source, a body, a gate and a recessed-FOX structure. Wherein the recessed-FOX structure is between the gate and the drift region vertically and between the body and the drain contact region laterally, and wherein the recessed-FOX structure is configured to make the drift region into a U shape. The present technology further discloses the depth of the drift region is controlled by adjusting a layout width.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388649-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019103400-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109524395-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-109524395-A
priorityDate 2011-08-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

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Total number of triples: 25.