| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e6830778c24e46daf97169dcc49de715
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e48952a81faf0f8393925e128835bb97 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01J19-088
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23G5-024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K35-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B23K1-203 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J29-48 |
| filingDate |
2012-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a99ff9bf648ae07eda113d176c93f4a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2da9ce729633f450e1094bc99420178c |
| publicationDate |
2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013026921-A1 |
| titleOfInvention |
Apparatus and method for removal of surface oxides via fluxless technique involving electron attachment |
| abstract |
Described herein is a method and apparatus for removing metal oxides on a surface of a component via electron attachment. In one embodiment, there is provided a field emission apparatus, wherein the electrons attach to at least a portion of the reducing gas to form a negatively charged atomic ions which removes metal oxides comprising: a cathode comprising an electrically conductive and comprising at least one or more protrusions having a high surface curvature, wherein the cathode is surrounded by a dielectric material which is then surrounded by an electrically conductive anode wherein the cathode and anode are each connected to an electrical voltage source, and the dielectric material between the cathode and anode is polarized to provide an electric field at one or more protrusions and thereby electrons from the cathode. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013187547-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9006975-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9053894-B2 |
| priorityDate |
2011-02-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |