| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_66250bb2c178685a4bca859f7824c7a3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6a764c65c653509ecb41970eda673988
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_268be9afa00cf55b5aa72b1612151ecb |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B29C33-3857
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0273
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0002 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C33-42
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B29C59-02 |
| filingDate |
2011-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4d06f482f0c0a6f9e1c0ba79fb69faca
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2d439268bcf4d16a8c0f365b677e8231 |
| publicationDate |
2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013026674-A1 |
| titleOfInvention |
Nanoimprinting method and method for producing a mold |
| abstract |
Volatilization of a photocuring composition is suppressed while reducing residual gas in a nanoimprinting method. A nanoimprinting method transfers the shapes of protrusions and recesses of a mold onto a photocuring composition layer formed on a substrate, by placing the mold and the photocuring composition layer in close contact. One or both of the mold and the substrate is formed by quartz. The mold and the substrate are placed in close contact with a gas having at least 70% He by volume and a pressure within a range from 10 kPa to 90 kPa interposed therebetween. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102086196-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11188058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102134626-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-106918986-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20200024816-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170077051-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11479860-B2 |
| priorityDate |
2010-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |