| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4fb2ceba4df95edc86e9d2fad43c2025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_363e91df41b05eec3d077421ce720894
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5128cfc84a0fb189fceb3cd240c44493
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e63b36a4170e265b8c58f252ee8be383 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-322
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22 |
| filingDate |
2011-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_aec28e9207f5d73c3d4b32832d67dcbf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a9ff52400d0271a4d3fabcd676fa67c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_96003c06dc3f36b951942896aa6ee3d1 |
| publicationDate |
2013-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2013026134-A1 |
| titleOfInvention |
Copper oxide etchant and etching method using the same |
| abstract |
In order to provide a copper oxide etchant and an etching method using the same capable of selectively etching exposure/non-exposure portions when laser light exposure is performed by using copper oxide as a thermal-reactive resist material, the copper oxide etchant for selectively etching copper oxides having different oxidation numbers in a copper oxide-containing layer containing the copper oxide as a main component contains at least a chelating agent or salts thereof. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8684793-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9741827-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9121101-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9373821-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11781236-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012045970-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10409164-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11492709-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015307779-A1 |
| priorityDate |
2010-02-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |