Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d2b7a684e8beeb16c8453053cdbcf2c3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f8936a8a811b8e1f54f9af2eeb97d08a http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cba29f2a9c06964660a469b6f44fd055 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6d2d5279e7cc0f910804c768c3bf59cf http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b984bb3f0f42ac242ac9781b9126a651 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bd204ef4640253941ad19665c6ecfb34 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C14-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-12 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-08 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y30-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y40-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0076 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82B3-0014 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-02 |
filingDate |
2012-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07e9a1bd5c11d59c2b23e9de21df3fb5 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bafa6e0da84e2582fe67dff9e2aa4a58 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f66529bb61f6bb5e9e61d23c45dd180b http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0fcdbd4cf73348d996ea0f855b30a5f2 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_374a2ea138d45d8914e7c364db4919b0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_576e4200776857f3bab8a358463039aa |
publicationDate |
2013-01-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-2013009287-A1 |
titleOfInvention |
Accurate deposition of nano-objects on a surface |
abstract |
The invention notably concerns a method for depositing nano-objects on a surface. The method includes: providing a substrate with surface patterns on one face thereof; providing a transfer layer on said face of the substrate; functionalizing areas on a surface of the transfer layer parallel to said face of the substrate, at locations defined with respect to said surface patterns, such as to exhibit enhanced binding interactions with nano-objects; depositing nano-objects and letting them get captured at the functionalized areas; and thinning down the transfer layer by energetic stimulation to decompose the polymer into evaporating units, until the nano-objects reach the surface of the substrate. The invention also provides a semiconductor device which includes a substrate and nano-objects accurately disposed on the substrate. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/FR-3108780-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11444041-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3889683-A1 |
priorityDate |
2011-04-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |