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inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe383da5e17c6c5b398cc01ea39e7de4
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publicationDate 2013-01-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2013001579-A1
titleOfInvention Array Substrate for Fringe Field Switching Mode Liquid Crystal Display and Method of Manufacturing the Same
abstract A method of manufacturing an array substrate for a fringe field switching mode liquid crystal display includes: forming an auxiliary insulating layer having a first thickness; forming first and second photoresist patterns on the auxiliary insulating layer; performing an ashing to remove the second photoresist pattern and expose the auxiliary insulating layer therebelow; performing a dry etching to remove the auxiliary insulating layer not covered by the first photoresist pattern and expose a first passivation layer and to form an insulating pattern below the first photoresist pattern, the insulating pattern and the first photoresist pattern forming an undercut shape; forming a transparent conductive material layer having a fourth thickness less than the first thickness; and performing a lift-off process to remove the first photoresist pattern and the transparent conductive material layer thereon together and form a pixel electrode.
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