| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_58e2d42e4598e3ba3895e200dc774329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_10a5f5d2415f8cd5b729b5fcd45b3e65 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-712
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-704
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S977-856 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K71-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-70
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K10-80
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-4146
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N27-403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N33-48721
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y15-00 |
| classificationIPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B82Y5-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L27-02 |
| filingDate |
2012-09-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_143c9ab81a921c071038e83b15940980
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_806d56778b905f97ca5437796603b3cb |
| publicationDate |
2012-12-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012326247-A1 |
| titleOfInvention |
Self-sealed fluidic channels for a nanopore array |
| abstract |
A method of forming a nanopore array includes patterning a front layer of a substrate to form front trenches, the substrate including a buried layer disposed between the front layer and a back layer; depositing a membrane layer over the patterned front layer and in the front trenches; patterning the back layer and the buried layer to form back trenches, the back trenches being aligned with the front trenches; forming a plurality of nanopores through the membrane layer; depositing a sacrificial material in the front trenches and the back trenches; depositing front and back insulating layers over the sacrificial material; and heating the sacrificial material to a decomposition temperature of the sacrificial material to remove the sacrificial material and form pairs of front and back channels, wherein the front channel of each channel pair is connected to the back channel of its respective channel pair by an individual nanopore. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9200883-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012279287-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10488394-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2017165267-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10976301-B2 |
| priorityDate |
2011-04-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |