| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1f7a07f7d7427fc7a5039dca4b483335
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5667bf837f740fd989bb56a25dc0837a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73c9079b8dd23f28e6e79a7f22ce4afe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31116
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0337 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-02 |
| filingDate |
2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5baaa009512778bec210fa6e8198950c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b37841ed065939731bd0f7f64f79baa7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_02187e600503f5969bc5c4b16d9aacc7 |
| publicationDate |
2012-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012309999-A1 |
| titleOfInvention |
Ammonium fluoride chemistries |
| abstract |
A method of removing at least a portion of a silicon oxide material is disclosed. The silicon oxide is removed by exposing a semiconductor structure comprising a substrate and the silicon oxide to an ammonium fluoride chemical treatment and a subsequent plasma treatment, both of which may be effected in the same vacuum chamber of a processing apparatus. The ammonium fluoride chemical treatment converts the silicon oxide to a solid reaction product in a self-limiting reaction, the solid reaction product then being volatilized by the plasma treatment. The plasma treatment includes a plasma having an ion bombardment energy of less than or equal to approximately 20 eV. An ammonium fluoride chemical treatment including an alkylated ammonia derivative and hydrogen fluoride is also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012267340-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9595452-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I700747-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9005459-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2021220834-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11715641-B2 |
| priorityDate |
2008-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |