http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012298879-A1
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_478431b569bdee0f82b03c40d870eef3 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_754a9da274afac5cd28cbc7e7c349509 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b504461d3fce0c6bdd704c039c91ee81 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_479993dae49fcad938f850f47d5db744 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-743 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J3-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G21K5-02 |
| filingDate | 2012-05-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6bd61c90ffb349acea13da47aec0475e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba85c352b9ed7d7998838316d07a740e http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_013933ade3fb7e58abeedd628a9b2660 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5d82beeba74fe81fa80dd4d76d739512 |
| publicationDate | 2012-11-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-2012298879-A1 |
| titleOfInvention | Apparatus and methods for forming an electrical conduction path through an insulating layer |
| abstract | One embodiment disclosed relates to an apparatus forming an electrical conduction path through an insulating layer on a surface of a substrate. A first radiation source is configured to emit radiation to a first region of the insulating layer, and a first electrical contact is configured to apply a first bias voltage to the first region. A second radiation source is configured to emit radiation to a second region of the insulating layer, and a second electrical contact is configured to apply a second bias voltage to the second region. The conductivities of the regions are increased by the radiation such that conductive paths are formed through the insulating layer at those regions. In one implementation, the apparatus may be used in an electron beam instrument. Another embodiment relates to a method of forming an electrical conduction path through an insulating layer. Other embodiments, aspects and features are also disclosed. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I631617-B http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9232626-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015123542-A1 |
| priorityDate | 2011-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.