| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_43998a7bd02bca9e8ff6dfe180be2aaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-3107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-73204
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-78
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06513
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2225-06544 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3221
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L25-0657
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-26 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-522 |
| filingDate |
2012-07-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_07a960f43f5881daa20780a21f806c42 |
| publicationDate |
2012-11-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012292784-A1 |
| titleOfInvention |
Semiconductor device |
| abstract |
A semiconductor device includes a semiconductor substrate having a first surface being an element formation surface, and a second surface opposite to the first surface; a through-hole formed to penetrate the semiconductor substrate from the first surface to the second surface; an insulating film formed on an inner wall of the through-hole; a barrier film formed on the inner wall of the through-hole with the insulating film interposed therebetween; and a conductive portion formed to fill the through-hole provided with the insulating film and the barrier film. A gettering site is formed in a portion of the semiconductor substrate around the through-hole at least near a side of the first surface. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10461069-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9831156-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11373958-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015021771-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10340247-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9147641-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10170337-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10651157-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10347607-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11658172-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9991244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11049895-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9576881-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847443-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019115321-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2022060837-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11791241-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9929050-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013134600-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9768143-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019074258-A1 |
| priorityDate |
2010-02-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |