http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012282775-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70d422f3fbb1bcd7cbac88ea4dc9af8c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_23385aeb1ad818f16f6364fb91f26038
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8a727f62aafffd58f18a452a6e65cb48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_055c8b4b9fd3f0e6554ec1f6668d6ed4
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31053
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-306
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
filingDate 2012-06-27-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_08c2a07ae24fc51fc7a897df44853d95
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c2d1ac5b16f0096deaa958b6813110f7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f110b49a835786829e91ee7944dd30c6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d20bfeda9326570e664ac5ea1bc9270d
publicationDate 2012-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012282775-A1
titleOfInvention Chemical Mechanical Polishing Slurry Compositions and Polishing Method Using the Same
abstract Disclosed herein is a CMP slurry composition. The CMP slurry composition includes cerium oxide particles, an adsorbent for adsorbing the cerium oxide particles to a polishing pad, an adsorption adjusting agent for adjusting adsorption performance of the adsorbent, and a pH adjusting agent. The CMP slurry composition may improve polishing efficiency of a patterned oxide layer and lifespan of a diamond disc conditioner.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10549399-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10619075-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10196542-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2018194792-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9346977-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10557059-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2017210497-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10557058-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10825687-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015024596-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10703947-B2
priorityDate 2009-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007251270-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008067077-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008261400-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009130849-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128027798
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID97250
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21903323
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID978
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1923
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129512598
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID228310638
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID69141
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127425989
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID2972
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID13859969
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID54680871
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226423055
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395715
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127444548
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8892
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID80971
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226581000
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226553900
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227309091
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68509
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7618
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID5922
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16773
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226472031
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128939400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID8094
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID938
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395968
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128125344
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227968920
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21834859
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406400
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53960240
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406399
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID177065
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128430378
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129338095
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID1018
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397689
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226399493
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID10243
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6723
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129971287
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415477
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21324477
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226486532
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226394161
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID135441757
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226406159
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7681
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128575486
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128023441
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128044411
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID18794272
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226780295
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129753389
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID228310640
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID379
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6131
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129322482
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226780296
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128216476
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129241406
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID3014803
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226396020
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226422161
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226479276
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127745499
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393949
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226445985

Total number of triples: 110.