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filingDate 2012-07-17-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5723c49f5d833f75fdd961903ab6b257
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publicationDate 2012-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012282553-A1
titleOfInvention Immersion upper layer film forming composition and method of forming photoresist pattern
abstract An immersion upper layer film composition includes a resin and a solvent. The resin forms a water-stable film during irradiation and is dissolved in a subsequent developer. The solvent contains a monovalent alcohol having 6 or less carbon atoms. The composition is to be applied to form a coat on a photoresist film in an immersion exposure process in which the photoresist film is irradiated through water provided between a lens and the photoresist film.
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http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID19710
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7274
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87064324
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127592033
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128347255
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15722431
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID518952
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136214057
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21872668
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128686089
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID518951
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226441419

Total number of triples: 620.