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publicationDate 2012-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012270143-A1
titleOfInvention Resist underlayer composition and method of manufacturing semiconductor integrated circuit devices using the same
abstract A resist underlayer composition, including a solvent, and an organosilane condensation polymerization product including about 10 to about 40 mol % of a structural unit represented by Chemical Formula 1:
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