| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_362caff8bc84ef51078d3a3eeb344391
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f1e28cb5f5ff6dca268ce399b742f316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fd446fb0d73aa96d044fea2eaa3c8ebc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_690b69e1678ac4aa79db34145458830a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-095
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2207-092 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B7-007 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84 |
| filingDate |
2012-03-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e0b1a97fb9f7f03f6c5ea46207c2cf30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1f269d2a6a3638068afeecccd14fb56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91de6c2a40cbcfabe1aad88d91c51bb8 |
| publicationDate |
2012-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012261774-A1 |
| titleOfInvention |
Mems package or sensor package with intra-cap electrical via and method thereof |
| abstract |
A MEMS device structure including a lateral electrical via encased in a cap layer and a method for manufacturing the same. The MEMS device structure includes a cap layer positioned on a MEMS device layer. The cap layer covers a MEMS device and one or more MEMS device layer electrodes in the MEMS device layer. The cap layer includes at least one cap layer electrode accessible from the surface of the cap layer. An electrical via is encased in the cap layer extending across a lateral distance from the cap layer electrode to the one or more MEMS device layer electrodes. An isolating layer is positioned around the electrical via to electrically isolate the electrical via from the cap layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10017378-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10017382-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9187317-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014184263-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9650239-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9260296-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9260295-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9604843-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9981841-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10775407-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10508029-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9085455-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9850125-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8802473-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9469527-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10519032-B2 |
| priorityDate |
2011-04-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |