http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012260856-A1

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f6f175f2c8eac40363953838045e7c40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_897ec57b9c0add2d2aebbddc54ff0cd5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d4b50e31fc704eb0c0b6b2297fd9c856
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_73886d1f0ecee7d449671f35f40f42ef
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7647a336ca4a00983cc0c8cb373aa664
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8cd17ae8fa8ac083a14227fcc50bf36
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-54
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-0236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-4587
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32715
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B65D19-26
filingDate 2012-03-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2c816ebf96927262205c9db227383731
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8f0b0016ff85cb4f39ed1d319bb13055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_52baf1b9e9cf3eed2dbccbe052bafb88
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_44cbdae0e883ceeff3a2eca4a10e8b3a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e6af3762639ba1dc5020b344a126b3a7
publicationDate 2012-10-18-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-2012260856-A1
titleOfInvention Plasma enhanced chemical vapor deposition apparatus and method for controlling the same
abstract There is disclosed a plasma enhanced chemical vapor deposition apparatus including a pallet to load and convey an object thereon to provide a functional film to the object by plasma reaction, wherein the pallet includes a base, a jig to fix the object, and a fixing part disposed on the base at an upper side of the fixing part Lo fix the object to the pallet.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10081870-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014014038-A1
priorityDate 2011-03-25-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012264051-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2007029046-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID46874763
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426334837

Total number of triples: 31.