| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3840cae937abb30a01dab58868d68893
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_31b1220216408a6076f55e0ba4ec1003 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76251
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-762
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L31-18 |
| filingDate |
2009-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b5d7e8c116a3b374d48c9e3ff95208e5 |
| publicationDate |
2012-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012258554-A1 |
| titleOfInvention |
Process for recycling a substrate |
| abstract |
A process for recycling a support substrate of a material substantially transparent to at least a wavelength of electromagnetic radiation. The process includes providing an initial substrate; forming an intermediate layer on a bonding face of the support substrate having an initial roughness, with the intermediate layer being of a material substantially transparent to at least a wavelength of electromagnetic radiation; forming an electromagnetic radiation absorbing layer either on the bonding face of the initial substrate or on the intermediate layer; bonding the initial substrate to the support substrate via the electromagnetic radiation absorbing layer; and irradiating the electromagnetic radiation absorbing layer through the support substrate and the intermediate layer to induce separation of the support substrate from the initial substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-105448707-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016189982-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110102882-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022208691-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018308642-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012280355-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9779968-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11626371-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8748294-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9761493-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10847324-B2 |
| priorityDate |
2009-12-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |