| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_37da04f0bc8977c616cd1df269b0378d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3f7a728ab2fa774820e9d31be44731ca |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H2245-50 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H05H1-32 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-56
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-50
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-455
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B44C1-22 |
| filingDate |
2011-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0409bc964459924b8ff6699207852c16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b684eb813ad3387e81ac4c58187a162a |
| publicationDate |
2012-10-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012255932-A1 |
| titleOfInvention |
Nanofabrication device and method for manufacture of a nanofabrication device |
| abstract |
A nanofabrication device in an example includes a conducting nanotip and a gas microchannel adjacent to the nanotip and configured to deliver a gas to the nanotip. The nanofabrication device can be used for controlled and localized etching and/or deposition of material from a substrate. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9580304-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107533974-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107533974-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2016217963-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014295064-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9038269-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2020343074-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9889653-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10026817-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015373824-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015217568-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9788404-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2020036971-A1 |
| priorityDate |
2010-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |