| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3cb5fd09cdd72cec6e1524453b7e5fc5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f96aa5fb688ac46af62a9c8bbdc3e970 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-02854
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0426
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2291-0237 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-01
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B17-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N29-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01B7-066 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 |
| filingDate |
2011-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34a5838d1df14363d8c43cadb5b13802 |
| publicationDate |
2012-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012201954-A1 |
| titleOfInvention |
Method of determining multilayer thin film deposition on a piezoelectric crystal |
| abstract |
A method for accurately calculating the thickness of deposited thin film layers onto a piezoelectric crystal blank in which dissimilar materials can be utilized, enabling determinations for various applications employing exotic materials. Additionally, the specific acoustic impedance (or equivalent z-ratio) of an unknown deposited material can be determined. The exact analytical solution nearly eliminates thickness errors when several layers of different materials are sequentially deposited on the same monitor quartz crystal. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014205742-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10446421-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8962067-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-104579233-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/EP-3062441-A4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9971341-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2016537875-A |
| priorityDate |
2011-02-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |