| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_993e7ff3f83ac658c85d23bcf6f5682b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ed0fcadc112b92a956a2551a3d88c613
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f221f61e9b172c272f8e217024f78975
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_29a69a0ffc85c9453f8e0f1fbbfa75f7 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-2041
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T29-42 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-10516
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-074
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-877
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10N30-079 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L41-22 |
| filingDate |
2011-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_655ce14ec88142d752a36abb2f60988a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_393c5368d0293a85d2e85379f87b9df6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_18dab3b9244c9216532ebe879e3a3f7d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c516957ed4f8afa95cebae549e1ca57 |
| publicationDate |
2012-07-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-2012187804-A1 |
| titleOfInvention |
Architecture for piezoelectric mems devices |
| abstract |
A piezoelectric thin film device comprises a piezoelectric thin film having upper and lower surfaces and a defined tilted crystal morphology, a top electrode disposed on the upper surface, a substrate having a surface morphology that corresponds to the defined crystallographically tilted morphology, and a bottom electrode disposed between and crystallographically linked to both the lower surface of the piezoelectric thin film and the substrate surface, the bottom and top electrodes having a parallel planar configuration relative to the plane of the substrate and the defined crystallographically tilted morphology having a crystallographic c-axis direction oriented at a >0° angle relative to the normal to the plane of the electrodes; and method of making the device. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10530334-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/DE-112019006130-B4
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112366273-A |
| priorityDate |
2011-01-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |